Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
SelectedSPIE · 2007
ISBN 9780819465757
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BookMachiningIntegrated opticsMiniature electronic equipmentOptoelectronic devicesMicroelectromechanical systemsMicromachiningCongressesDesign and constructionMicrofabrication
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary Maher, Thomas Ann Suleski, Eric Johnson undifferentiated, Harold Stewart, Jung-Chih Chiao
2007 · 370 pages · EN
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Authors & contributors
MM
Mary Maher
Author
TA
Thomas Ann Suleski
Author
EJ
Eric Johnson undifferentiated
Author
HS
Harold Stewart
Author
JC
Jung-Chih Chiao
Author